苏州源展材料科技

产品名称：CpHf(NMe2)3

CAS号：941596-80-1

分子式：C11H23N3Hf

分子量：375.81

外观： yellow liq.

稳定性： air and moisture sensitive

Recent Research

Superior and stable ferroelectric properties of hafnium-zirconium-oxide thin films deposited  atomic layer deposition using cyclopentadienyl-based precursors without annealing.

Achieving High Dielectric Constants in Tetragonal Single‐Phase ZrHfO2 Thin Films through the Atomic Layer Deposition Process Using a Mixed Precursor

Evaluation of high thermal stability cyclopentadienyl Hf precursors with H2O as a co-reactant for advanced gate logic applications

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